Web17 aug. 1998 · As a result, ion energy distributions typically consisted of a single feature well separated from zero energy. Mean ion energy was independent of rf power and … Web28 sep. 2024 · The ion energy and angular distributions of H +, H 2 +, and H 3 + impinging on an extraction aperture (3 mm in radius) have been investigated with a hybrid model of an inductively coupled H 2 ion source. A dc is applied at the end of the cylinder discharge chamber, which pulls these three ions toward the extraction aperture.

Angular and energy distribution of fragment ions in dissociative …

WebField, Matthew R, Dougal G McCulloch, Sunnie HN Lim, André Anders, Vicki J Keast, and R.W. Burgess. " The structure and electron energy loss near edge structure of tungsten oxide thin films prepared by pulsed cathodic arc deposition and plasma-assisted pulsed magnetron sputtering." Journal of Physics: Condensed Matter 20 (2008) 175216. LBNL … Web1 sep. 2024 · In the present study, thorough investigation of angular distribution of ions energy and flux is considered using time of flight (TOF) technique. An array of six … reactive band

Numerical investigation of ion energy and angular distributions in …

WebWe studied the angular distributions of silicon and nitrogen atoms emitted from a Si target subjected to reactive sputtering by N 2 + ions at primary energies of 0.5 and 2keV. The composition of the deposited material does not depend strongly on the substrate position. From a comparison with nonreactive sputtering, we show that the observed shift of the Si … Web20 mei 2024 · A hybrid model, which consists of a fluid module, a sheath module and an ion Monte Carlo module, is employed to investigate the dependence of ion energy and … WebAngular and Energy Distribution of Ejected Atoms • Sputtered atoms have relatively small energies, typically between 2 - 7 eV (in thermal evaporation, ... Boltzmann like. • The … reactive bandemia